Research Programs

Polymer Integrated Optical Devices through Soft Lithography

Challenge:

Develop simple, non-expensive, and precise lithographic process to fabricate channel waveguides for integrated optical devices.

Approach:

Employ soft lithography to imprint sophisticated channel waveguide structures and provide a simple process
for the mass production of devices.

Impact:

Both active (E-O Mach-Zhender modulators) and passive (micro-ring filters and AWGs) have been demonstrated by this process with high degree of replication of
the master structures.